场发射俄歇电子能谱显微分析

摘 要：场发射俄歇电子能谱的显微分析是一项新的分析技术，可对微尺度样品进行点、线、面的元素组分及元素化学态分析。本文简要介绍这项新技术的功能原理和在微电子器件检测等方面的具体应用。

关键词：微电子器件   场发射俄歇电子能谱

Abstract：Microanalysis of field emission Auger Electron Spectroscopy (FEAES) is a novel analytical techNIque, which can be used to analyze elements and their chemical valences of micro features on a sample, when the irradiation electron beams are fixed on point as chosen, or scan across the sample by the ways of lines and regions Both technique and its theory are briefly introduced, and applications to analyzing microelectronic devices are illuminated in the paper.